MEMS & MOEMS Tutorial (4h)
Dr. Ken Gilleo
Cookson Electronics
25 Forbes Blvd.
Foxboro, MA 02035
kgilleo@cooksonelectronics.com
www.cooksonelectronics.com
Level: Introductory – Intermediate
Duration: 1/2-day
This new tutorial surveys MEMS and includes the latest developments and applications. The first section overviews materials and fabrication methods. Next, the numerous actuation mechanisms are compared and discussed with recommendations for applications. We will thoroughly examine the role that MEMS is beginning to play in almost every industry. Applications and case histories include: telecommunications (especially RF-MEMS, microphones, MOEMS optical switches, and fiber aligners), automotive, computers, entertainment (games, cinema), aerospace, military, sensors, biotechnology, anti-theft, anti-terrorism, Energy-MEMS (turbines, generators and extractors) and equipment monitoring. Optical MEMS topics will cover MOEMS for telecom and display, including the growing area of digital cinema. We’ll also look at markets and growth potentials for this “healthy” and successful technology.
Packaging is thoroughly discussed because there are still many unresolved issues and there is need for true innovation. We start with the traditional hermetic package (butterfly) and move to near-hermetic packaging (NHP). Emerging concepts include the latest 0-Level ideas; Cap-on-Chip, and other wafer-level packaging (WLP) approaches. New packages are just now moving into production and are described with diagrams and photographs. New plastic packages, including epoxies and advanced Liquid Crystal Polymer (LCP) are included. Wafer-level packaging (WLP) schemes will be covered, especially capping concepts. Assembly and handling of MEMS packages is provided with guidelines.
About the Instructor
Dr. Ken Gilleo is an inventor, writer, magazine columnist, packaging specialist and materials scientist with over 30 years of industrial experience that includes hands-on work with flexible printed circuits, flip chip, CSPs, general packaging, MEMS and OE. He holds over 50 US and hundreds of international patents, has made more than 400 presentations and authored 3 technical books with a 4th in progress. Ken is General Technologist for Cookson Electronics and presently works on MEMS and OE packaging.
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